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The influence of post-annealing treatment on the electrical properties of In2O3 thin films prepared by an ultrasonic spray CVD process
Mihaela GirtanVolume:
184
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.surfcoat.2003.10.136
File:
PDF, 857 KB
english, 2004