Chemical vapour deposition of PyC–SixCy–SiC–Si3N4...

Surface and Coatings Technology 2004 Vol. 180-181; Iss. none

Chemical vapour deposition of PyC–SixCy–SiC–Si3N4 multilayer with graded C…SiC transition

E. Roos, K. Maile, K. Berreth, A. Lyutovich, R. Weiss, T. Perova, A. Moore
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Volume:
180-181
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.surfcoat.2003.10.144
File:
PDF, 614 KB
english, 2004
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