USJ Dopant Bleaching and Device Effects in Advanced...

USJ Dopant Bleaching and Device Effects in Advanced Microelectronic Plasma Enhanced Resist Strip Processing

Wirbeleit, Frank, Grimm, Volker, Krüger, Christian, Streck, Christoph, Sonnemans, Roger, Berry, Ivan
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Volume:
1070
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1070-E01-12
Date:
January, 2008
File:
PDF, 942 KB
english, 2008
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