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USJ Dopant Bleaching and Device Effects in Advanced Microelectronic Plasma Enhanced Resist Strip Processing
Wirbeleit, Frank, Grimm, Volker, Krüger, Christian, Streck, Christoph, Sonnemans, Roger, Berry, IvanVolume:
1070
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1070-E01-12
Date:
January, 2008
File:
PDF, 942 KB
english, 2008