Quantitative Determination of the Mechanical Stresses in...

MRS Proceedings 2012 / 1 Vol. 1428

Quantitative Determination of the Mechanical Stresses in BEoL Films and Structures on Si Wafers with Sub-micron Spatial Resolution by fibDAC

Rzepka, Sven, Vogel, Dietmar, Auerswald, Ellen, Michel, Bernd
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Volume:
1428
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2012.1362
Date:
January, 2012
File:
PDF, 1.74 MB
english, 2012
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