Defect Characterization of 4H-SiC Bulk Crystals Grown on...

Materials Science Forum 2005 Vol. 483-485

Defect Characterization of 4H-SiC Bulk Crystals Grown on Micropipe Filled Seed Crystals

Kato, Tomohisa, Kojima, Kazutoshi, Nishizawa, Shinichi, Arai, Kazuo
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Volume:
483-485
Year:
2005
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.483-485.315
File:
PDF, 2.48 MB
english, 2005
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