Investigation of Template Releasing Energy in Nanoimprint...

MRS Proceedings 2013 / 1 Vol. 1499

Investigation of Template Releasing Energy in Nanoimprint Lithography

Nishino, Tomoki, Fujikawa, Norihiro, Kawata, Hiroaki, Hirai, Yoshihiko
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Volume:
1499
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2013.412
Date:
January, 2013
File:
PDF, 4.79 MB
english, 2013
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