Growth kinetics of W5Si3 layer in WSi2/W system

Growth kinetics of W5Si3 layer in WSi2/W system

Kyung-Hwan Lee, Jin-Kook Yoon, Jong-Kwon Lee, Jung-Mann Doh, Kyung-Tae Hong, Woo-Young Yoon
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Volume:
187
Year:
2004
Language:
english
Pages:
8
DOI:
10.1016/j.surfcoat.2004.02.039
File:
PDF, 337 KB
english, 2004
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