Reduction of Surface Roughness of 4H-SiC by...

Materials Science Forum 2010 / 4 Vol. 645-648

Reduction of Surface Roughness of 4H-SiC by Catalyst-Referred Etching

Okamoto, Takeshi, Sano, Yasuhisa, Hara, Hideyuki, Hatayama, Tomoaki, Arima, Kenta, Yagi, Keita, Murata, Junji, Sadakuni, Shun, Tachibana, K., Shirasawa, Y., Mimura, Hidekazu, Fuyuki, Takashi, Yamauchi
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Volume:
645-648
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.645-648.775
Date:
April, 2010
File:
PDF, 762 KB
english, 2010
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