Realization of ultra shallow junctions by PIII: application...

Surface and Coatings Technology 2004 Vol. 186; Iss. 1-2

Realization of ultra shallow junctions by PIII: application to solar cells

Frank Torregrosa, Cyrille Laviron, Hasnaa Faik, Damien Barakel, Frédéric Milesi, Sébastien Beccaccia
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Volume:
186
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.surfcoat.2004.04.046
File:
PDF, 712 KB
english, 2004
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