Influences of the nitrogen content on the morphological, chemical and optical properties of pulsed laser deposited silicon nitride thin films
J.M. Lackner, W. Waldhauser, R. Berghauser, R. Ebner, M. Beutl, G. Jakopic, G. Leising, H. Hutter, M. Rosner, T. SchöberlVolume:
192
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.surfcoat.2004.04.080
File:
PDF, 375 KB
english, 2005