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Plasma-ion beam source enhanced deposition system
Guoqing Li, Cui Liu, Jianfeng Li, Chengwu Zhang, Zongxin Mu, Zhenhu LongVolume:
193
Year:
2005
Language:
english
Pages:
5
DOI:
10.1016/j.surfcoat.2004.07.040
File:
PDF, 544 KB
english, 2005