Structure and Dielectric Properties of AlN Multilayered...

Key Engineering Materials 2008 Vol. 368-372

Structure and Dielectric Properties of AlN Multilayered Film on Al Substrate

Song, Xiu Feng, Fu, Ren Li, He, Hong, Wang, De Liu
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Volume:
368-372
Year:
2008
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.368-372.1383
File:
PDF, 9.61 MB
english, 2008
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