Influence of process parameters on the properties of...

Surface and Coatings Technology 2004 Vol. 188-189; Iss. none

Influence of process parameters on the properties of TEOS–PECVD-grown SiO2 films

A.M. Mahajan, L.S. Patil, D.K. Gautam
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Volume:
188-189
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.surfcoat.2004.08.051
File:
PDF, 423 KB
english, 2004
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