Preparation of superhard amorphous carbon films with low...

Surface and Coatings Technology 2004 Vol. 188-189; Iss. none

Preparation of superhard amorphous carbon films with low internal stress

Steffen Weissmantel, Günter Reisse, Dirk Rost
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Volume:
188-189
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.surfcoat.2004.08.070
File:
PDF, 500 KB
english, 2004
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