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Understanding Multi Scale Pad Effects in Chemical Mechanical Planarization
Chandra, Abhijit, Bastawros, Ashraf. F., Karra, Pavan K.Volume:
1157
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1157-E02-01
Date:
January, 2009
File:
PDF, 248 KB
english, 2009