Effect of substrate angle on properties of ITO films...

Surface and Coatings Technology 2005 Vol. 198; Iss. 1-3

Effect of substrate angle on properties of ITO films deposited by cathodic arc ion plating with In–Sn alloy target

Alex Jyh-Chung Wen, Kai-Lin Chen, Ming-Huei Yang, Wei-Tien Hsiao, Lin-Gen Chao, Ming-Sheng Leu
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Volume:
198
Year:
2005
Language:
english
Pages:
5
DOI:
10.1016/j.surfcoat.2004.10.082
File:
PDF, 409 KB
english, 2005
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