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Microarcing instability in RF PECVD plasma system
Y. Yin, M.M.M. Bilek, D.R. McKenzie, R.W. Boswell, C. CharlesVolume:
198
Year:
2005
Language:
english
Pages:
5
DOI:
10.1016/j.surfcoat.2004.10.089
File:
PDF, 246 KB
english, 2005