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Response of sputtered titanium films on silicon to thermal oxidation
Y.L. Brama, Y. Sun, S.R.K. Dangeti, M. MujahidVolume:
195
Year:
2005
Language:
english
Pages:
9
DOI:
10.1016/j.surfcoat.2004.11.016
File:
PDF, 899 KB
english, 2005