Etching characteristics of multiple U-type internal linear inductively coupled plasma for flat panel display
Seung Jae Jung, Kyong Nam Kim, Geun Young YeomVolume:
200
Year:
2005
Language:
english
Pages:
4
DOI:
10.1016/j.surfcoat.2005.01.062
File:
PDF, 173 KB
english, 2005