Gettering of Copper and Nickel in Czochralski Silicon by Oxide Particles: Assessment of Thermal Stability
Falster, Robert J., Laczik, Z., Booker, G.R., Török, PéterVolume:
19-20
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.19-20.33
Date:
January, 1991
File:
PDF, 802 KB
1991