Two Dimensional Fluid Model of RF Plasmas in...

Two Dimensional Fluid Model of RF Plasmas in S i H 4 / A r Mixtures

Sato, Nobuyasu, Shida, Yutaka
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Volume:
36
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.36.4794
Date:
July, 1997
File:
PDF, 744 KB
1997
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