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A compact optical pickup head in blue wavelength with high horizontal stability for laser thermal lithography
Lee, Yuan-Chin, Chao, Shiuh, Huang, Chun-Chieh, Cheng, Kuen-ChiuanVolume:
21
Language:
english
Journal:
Optics Express
DOI:
10.1364/oe.21.023556
Date:
October, 2013
File:
PDF, 4.17 MB
english, 2013