Comparison of the ionisation efficiency in a microwave and...

Surface and Coatings Technology 2005 Vol. 200; Iss. 1-4

Comparison of the ionisation efficiency in a microwave and a radio-frequency assisted magnetron discharge

L. de Poucques, J.C. Imbert, P. Vasina, C. Boisse-Laporte, L. Teulé-Gay, J. Bretagne, M. Touzeau
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Volume:
200
Year:
2005
Language:
english
Pages:
4
DOI:
10.1016/j.surfcoat.2005.03.046
File:
PDF, 127 KB
english, 2005
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