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Microstructure evolution of ZrN films annealed in vacuum
Yu-Chih Chieh, Wen-Zheng Lo, Fu-Hsing LuVolume:
200
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.surfcoat.2005.07.048
File:
PDF, 271 KB
english, 2006