Characterization of ‘ARE’ deposited silicon nitride films...

Surface and Coatings Technology 2005 Vol. 200; Iss. 7

Characterization of ‘ARE’ deposited silicon nitride films and their feasibility as antireflection coating

Sheetal J. Patil, K.C. Mohite, A.B. Mandale, M.G. Takwale, S.A. Gangal
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Volume:
200
Year:
2005
Language:
english
Pages:
7
DOI:
10.1016/j.surfcoat.2005.07.068
File:
PDF, 381 KB
english, 2005
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