Single-target DC-pulsed deposition of lead zirconate...

Single-target DC-pulsed deposition of lead zirconate titanate thin films: Investigation of the chemical and mechanical properties by glow-discharge optical emission spectroscopy and nanoindentation

P. Schwaller, A. Fischer, R. Thapliyal, M. Aeberhard, J. Michler, H.J. Hug
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Volume:
200
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.surfcoat.2005.08.036
File:
PDF, 175 KB
english, 2005
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