Effect of process parameters on the structure of Si–Ti–N nanostructured coatings deposited by hypersonic plasma particle deposition
J. Hafiz, R. Mukherjee, X. Wang, M. Marshall, R.D. Twesten, M. Cullinan, J.V.R. Heberlein, P.H. McMurry, S.L. GirshickVolume:
200
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.surfcoat.2005.08.090
File:
PDF, 299 KB
english, 2005