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Fabrication and Characterization of Normal and Shear Stresses Sensitive Tactile Sensors by Using Inclined Micro-cantilevers Covered with Elastomer
Sohgawa, Masayuki, Huang, Yu-Ming, Noda, Minoru, Kanashima, Takeshi, Yamashita, Kaoru, Okuyama, Masanori, Ikeda, Masaaki, Noma, HaruoVolume:
1052
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1052-DD04-07
Date:
January, 2007
File:
PDF, 318 KB
english, 2007