Control of stress and delamination in single and...

Surface and Coatings Technology 2006 Vol. 200; Iss. 22-23

Control of stress and delamination in single and multi-layer carbon thin films prepared by cathodic arc and RF plasma deposition and implantation

Peter C.T. Ha, D.R. McKenzie, M.M.M. Bilek, E.D. Doyle, D.G. McCulloch, P.K. Chu
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Volume:
200
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.surfcoat.2005.11.011
File:
PDF, 169 KB
english, 2006
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