Structure of superhard nanocrystalline (Ti,Al)N layers deposited by reactive pulsed magnetron sputtering
O. Zywitzki, H. Klostermann, F. Fietzke, T. ModesVolume:
200
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.surfcoat.2005.11.018
File:
PDF, 415 KB
english, 2006