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Comparison of structure and mechanical properties of SiO2-like films deposited in O2/HMDSO pulsed and continuous plasmas
A. Bousquet, V. Bursikova, A. Goullet, A. Djouadi, L. Zajickova, A. GranierVolume:
200
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.surfcoat.2005.11.025
File:
PDF, 171 KB
english, 2006