Electrochemical Etching of n-Type 6H-SiC Using Aqueous KOH...

Materials Science Forum 2003 Vol. 433-436

Electrochemical Etching of n-Type 6H-SiC Using Aqueous KOH Solutions

Kato, Masashi, Ichimura, Masaya, Arai, Eisuke, Ramasamy, P.
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Volume:
433-436
Year:
2003
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.433-436.665
File:
PDF, 825 KB
english, 2003
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