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Evaluation of adhesion and tribological behaviour of tantalum oxynitride thin films deposited by reactive magnetron sputtering onto steel substrates
O. Banakh, C. Csefalvay, P.-A. Steinmann, M. Fenker, H. KapplVolume:
200
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.surfcoat.2005.11.079
File:
PDF, 257 KB
english, 2006