High resolution electron microscopy of CrN–TiN thin films grown on Si(100) by magnetron sputtering
N. Frangis, D. Papapetros, I. Tsiaoussis, S. LogothetidisVolume:
200
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.surfcoat.2005.11.092
File:
PDF, 616 KB
english, 2006