Critical Thickness Threshold in HfO2 Layers

Solid State Phenomena 2008 Vol. 134

Critical Thickness Threshold in HfO2 Layers

Besson, Pascal, Loup, Virginie, Salvetat, Thierry, Rochat, Névine, Lhostis, Sandrine, Favier, Sylvie, Dabertrand, Karen, Cosnier, Vincent
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Volume:
134
Year:
2008
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.134.67
File:
PDF, 1.86 MB
english, 2008
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