Internal stress and adhesion of Cu film/Si prepared by both...

Surface and Coatings Technology 2006 Vol. 201; Iss. 3-4

Internal stress and adhesion of Cu film/Si prepared by both MEVVA and IBAD

Miao Yu, Jizhong Zhang, Dexing Li, Qingli Meng, Wenzhi Li
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Volume:
201
Year:
2006
Language:
english
Pages:
7
DOI:
10.1016/j.surfcoat.2006.01.047
File:
PDF, 510 KB
english, 2006
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