Surface characterization of silicon carbide following...

Surface characterization of silicon carbide following shallow implantation of platinum ions

C.I. Muntele, R. Ichou, I.C. Muntele, S. Sarkisov, D. Ila
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Volume:
201
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.surfcoat.2006.01.082
File:
PDF, 485 KB
english, 2007
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