Influence of plasma ion-beam assistance on TiO2 and MgF2 thin films deposited by plasma ion-assisted deposition
Seouk-Hoon Woo, Chang Kwon HwangboVolume:
201
Year:
2007
Language:
english
Pages:
8
DOI:
10.1016/j.surfcoat.2006.01.085
File:
PDF, 1.86 MB
english, 2007