Ion irradiation effects on optical properties of silicon...

Ion irradiation effects on optical properties of silicon nitride films

N. Matsunami, N. Shinde, M. Tazawa, S. Nakao, M. Sataka, Y. Chimi
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Volume:
201
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.surfcoat.2006.01.091
File:
PDF, 385 KB
english, 2007
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