The effects of Si incorporation on the thermal and tribological properties of DLC films deposited by PBII&D with bipolar pulses
J. Choi, S. Nakao, S. Miyagawa, M. Ikeyama, Y. MiyagawaVolume:
201
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.surfcoat.2006.02.084
File:
PDF, 539 KB
english, 2007