Observation of a Si surface sputtered by an ion irradiation...

Surface and Coatings Technology 2007 Vol. 201; Iss. 19-20

Observation of a Si surface sputtered by an ion irradiation system using a prototype compact cluster ion source

Yoshikazu Teranishi, Kouji Kondou, Takeshi Mizota, Yukio Fujiwara, Hidehiko Nonaka, Kazuhiro Yamamoto, Toshiyuki Fujimoto, Shingo Ichimura
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Volume:
201
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.surfcoat.2006.02.085
File:
PDF, 1.17 MB
english, 2007
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