Advances in Two-Dimensional Dopant Profiling and Imaging of...

Materials Science Forum 2006 Vol. 527-529

Advances in Two-Dimensional Dopant Profiling and Imaging of 4H-SiC Devices

Buzzo, Marco, Ciappa, Mauro, Treu, Michael, Fichtner, Wolfgang
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Volume:
527-529
Year:
2006
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.527-529.787
File:
PDF, 1.33 MB
english, 2006
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