Silicon carbide and boron carbide thin films formed by plasma immersion ion implantation of hydrocarbon gases
W. Ensinger, G. Kraft, F. Sittner, K. Volz, K. Baba, R. HatadaVolume:
201
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.surfcoat.2006.03.057
File:
PDF, 318 KB
english, 2007