Effect of target bias on magnetic field enhanced plasma...

Effect of target bias on magnetic field enhanced plasma immersion ion implantation

K.G. Kostov, J.J. Barroso, M. Ueda
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Volume:
201
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.surfcoat.2006.03.061
File:
PDF, 783 KB
english, 2007
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