Preparation of TiN-Based Nitride Composite Films from Alkoxide Solution by Liquid Injection Thermal Plasma CVD Method
Shimada, Shiro, Tsukurimichi, K., Takada, Yusuke, Tsujino, J.Volume:
264-268
Year:
2004
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.264-268.49
File:
PDF, 857 KB
english, 2004