Effect of Ti interlayer on the residual stress and texture development of TiN thin films deposited by unbalanced magnetron sputtering
Jia-Hong Huang, Cheng-Hsin Ma, Haydn ChenVolume:
201
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.surfcoat.2006.06.038
File:
PDF, 1.01 MB
english, 2006