Deposition of silicon carbon nitride thin films by...

Surface and Coatings Technology 2007 Vol. 201; Iss. 9-11

Deposition of silicon carbon nitride thin films by microwave ECR plasma enhanced unbalance magnetron sputtering

Peng Gao, Jun Xu, Yong Piao, Wanyu Ding, Dehe Wang, Xinlu Deng, Chuang Dong
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Volume:
201
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.surfcoat.2006.07.197
File:
PDF, 374 KB
english, 2007
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