Preparation of vanadium oxide thin films with high temperature coefficient of resistance by facing targets d.c. reactive sputtering and annealing process
Yuqiang Lv, Ming Hu, Miao Wu, Zhigang LiuVolume:
201
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.surfcoat.2006.07.211
File:
PDF, 605 KB
english, 2007