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UHV arc for high quality film deposition
R. Russo, A. Cianchi, Y.H. Akhmadeev, L. Catani, J. Langner, J. Lorkiewicz, R. Polini, B. Ruggiero, M.J. Sadowski, S. Tazzari, N.N. KovalVolume:
201
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.surfcoat.2006.08.017
File:
PDF, 1.18 MB
english, 2006