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Simulations of Iron Re-Dissolution from Oxygen Precipitates in Cz-Silicon and its Impact on Gettering Efficiency
Väinölä, Hele, Zhang, Peng, Haarahiltunen, A., Istratov, Andrei A., Weber, Eicke R.Volume:
95-96
Year:
2004
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.95-96.581
File:
PDF, 208 KB
english, 2004